LASER-RECRYSTALLIZED POLYCRYSTALLINE SILICON RESISTORS FOR INTEGRATED CIRCUIT APPLICATIONS.

被引：0

作者：

Schaber, H.

Cutter, D.

Binder, J.

Obermeier, E.

机构：

[1] Siemens AG, Zentralbereich Technik, Otto-Hahn-Ring 6, D-8000 München 83, Germany

[2] Siemens AG, Unternehmensbereich Bauelemente, Balanstr. 73, D-8000 München 80, Germany

[3] Fraunhofer-Institut für Festkörpertechnologie, Paul-Gerhardt-Allee 42, D-8000 München 60, Germany

来源：

Journal of Applied Physics | 1983年 / 54卷 / 08期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：4633 / 4640

共 50 条

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