Micromechanics and micromachining of semiconductor sensors

被引：0
|
作者：
Hok, Bertil [1 ]
机构：
[1] Univ of Uppsala, Sweden
来源：
Acta Polytechnica Scandinavica, Electrical Engineering | 1988年 / 63期
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D O I：
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学科分类号：
摘要：
Sensors
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页码：65 / 84
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