STUDY OF EXTRINSIC GETTERING OF EPITAXIAL SUBSTRATES.

被引：0
|
作者：
Medernach, John W. [1 ]
Wells, Victor A. [1 ]
Witherspoon, Linda L. [1 ]
机构：
[1] Sandia Natl Lab, Albuquerque, NM,, USA, Sandia Natl Lab, Albuquerque, NM, USA
来源：
Semiconductor International | 1987年 / 10卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
29
引用
收藏
页码：106 / 110
相关论文
共 50 条
  • [1] Growth of Epitaxial ZnSe Films on Semiconductor Substrates.
    Ivanov, V.A.
    Murav'eva, K.K.
    Kalinkin, I.P.
    Izvestiya Akademii Nauk SSSR, Neorganicheskie Materialy, 1976, 12 (04): : 619 - 622
  • [2] EPITAXIAL DEPOSITION OF GaAs AND GaAsP ON Ge SUBSTRATES.
    Jager, H.
    Seipp, E.
    1600, (49):
  • [3] EXTRINSIC GETTERING VIA EPITAXIAL MISFIT DISLOCATIONS - ELECTRICAL CHARACTERIZATION
    SALIH, ASM
    RYU, JS
    ROZGONYI, GA
    BEAN, KE
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (06) : C223 - C223
  • [4] EXTRINSIC GETTERING VIA EPITAXIAL MISFIT DISLOCATIONS - ELECTRICAL CHARACTERIZATION
    SALIH, ASM
    RYU, JS
    ROZGONYI, GA
    BEAN, KE
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (03) : 475 - 478
  • [5] THERMAL STABILITY OF THIN EPITAXIAL FILMS ON SOLID SUBSTRATES.
    Makarovskii, N.A.
    Khomeriki, N.D.
    Physics of Metals (English Translation of Metallofizika), 1984, 5 (02): : 339 - 344
  • [6] NITRIDE EXTRINSIC GETTERING FOR CMOS N/N+ EPITAXIAL DEVICES
    MEDERNACH, JW
    WELLS, VA
    WITHERSPOON, L
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (06) : 1272 - 1273
  • [7] SELECTIVE ETCHING AND PHOTOLUMINESCENCE OF EPITAXIAL CdTe FILMS ON GaAs SUBSTRATES.
    Faschinger, W.
    Lischka, K.
    Sitter, H.
    Chemtronics, 1987, 2 (01): : 28 - 31
  • [8] GETTERING OF P+ (100) SI SUBSTRATES FOR EPITAXIAL-GROWTH
    DYSON, W
    HELLWIG, L
    MOODY, J
    ROSSI, JA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (03) : C90 - C90
  • [9] Epitaxial growth of multicationic thin films on single-crystal substrates.
    Beach, DB
    Morrell, JS
    Xue, ZLB
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1999, 218 : U876 - U876
  • [10] THERMOPLASTIC SUBSTRATES.
    Hastie, William M.
    Circuits Manufacturing, 1985, 25 (10): : 31 - 32
12345