Study on defects in CZ-Si crystals grown under three different cusp magnetic fields by infrared light scattering tomography

被引:3
|
作者
Ma, Minya [1 ]
Ogawa, Tomoya [1 ]
Watanabe, Masahito [2 ]
Eguchi, Minoru [2 ]
机构
[1] Computer Center, Dept. Phys., Gakushuin Univ., M., Tokyo, Japan
[2] Fundamental Research Laboratories, NEC Corporation, Tsukuba, 305-8501, Ibaraki, Japan
来源
Journal of Crystal Growth | 1999年 / 205卷 / 01期
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页码:50 / 58
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