Measurement of the adhesion strength of metal oxide and metal nitride thin films sputtered onto glass by the direct pull-off method

被引：0

作者：

Suzuki, S. ^{[1
]}

Hayashi, Y. ^{[1
]}

Suzuki, K. ^{[1
]}

Ando, E. ^{[1
]}

机构：

[1] Research Center, Asahi Glass Co., Ltd., 1150 Hazawa-cho, Kanagawa-ku, Yokohama 221, Japan

来源：

Journal of Adhesion Science and Technology | 1997年 / 11卷 / 08期

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摘要：

引用

页码：1137 / 1147

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[1] Measurement of the adhesion strength of metal oxide and metal nitride thin films sputtered onto glass by the direct pull-off method
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