ASYMMETRIC OVERHANG IN ELECTRON-BEAM RESIST BY DIRECT WRITING FOR A RECESSED-OFFSET-GATE GaAs MESFET.

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作者：
Kosemura, Kinjiro
Yamashita, Yoshimi
Ishiwari, Hidetoshi
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Fujitsu Scientific and Technical Journal | 1987年 / 23卷 / 02期
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页码：119 / 124
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