FIRST EXPERIMENTAL RESULTS OF AN E-BEAM TESTER WITH DISPERSIVE SECONDARY ELECTRON ENERGY ANALYZER.

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作者：
Dubbeldam, Luc [1 ]
Kruit, Pieter [1 ]
机构：
[1] Delft Univ of Technology, Delft, Neth, Delft Univ of Technology, Delft, Neth
来源：
Microelectronic Engineering | 1987年 / 7卷 / 2-4期
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摘要：
11
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页码：231 / 234
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