Study of the spectrum transmission gas sensing characters of SnO2 thin film made with vapor deposit

Adopting vapor deposition method, controlling the deposition temperature and deposition time strictly, then controlling the film thickness, thus the doped and undoped SnO2 films were prepared. Under the action of reducing gas alcohol, the spectrum transmission test was carried out. The result shows that the SnO2 film prepared by vapor deposition has the advantages such as the thickness can be controlled, the technology repeatability is good, and the sensibility is high.