Micromachined free-space integrated micro-optics

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[1] Wu, M.C.
[2] Lin, L.-Y.
[3] Lee, S.-S.
[4] Pister, K.S.J.
来源：
Wu, M.C. | 1600年 / Elsevier Science S.A., Lausanne, Switzerland卷 / 50期
关键词：
Free space microoptical bench (FSMOB) - Integrated microoptics - Surface micromachining;
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