An automatic measuring system for electrochemical C-V profiling

被引：0
|
作者：
Irin, I.V. [1 ]
Murel', A.V. [1 ]
机构：
[1] Inst Prikladnoj Fiziki RAN, Nizhnij Novgorod, Russia
来源：
Pribory i Tekhnika Eksperimenta | 1993年 / 06期
关键词：
Control measurement complex - Electrochemical profiling - Profile control;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：150 / 155
相关论文
共 50 条
  • [1] AUTOMATIC MEASURING FACILITY FOR ELECTROCHEMICAL C-V PROFILING
    IRIN, IV
    MUREL, AV
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1993, 36 (06) : 918 - 921
  • [2] Electrochemical C-V profiling of silicon structure
    Kinder, R
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1997, 164 (02): : 785 - 789
  • [3] ELECTROCHEMICAL C-V PROFILING OF HETEROJUNCTION DEVICE STRUCTURES
    SEABAUGH, AC
    FRENSLEY, WR
    MATYI, RJ
    CABANISS, GE
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (02) : 309 - 313
  • [4] AUTOMATIC C-V PLOTTER
    FORWARD, KE
    HASEGAWA, H
    HARTNAGEL, HL
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1975, 8 (06): : 487 - 489
  • [5] Choice of electrolyte for doping profiling in Si by electrochemical C-V technique
    Basaran, E
    APPLIED SURFACE SCIENCE, 2001, 172 (3-4) : 345 - 350
  • [6] AN IMPROVED METHOD FOR THE ELECTROCHEMICAL C-V PROFILING OF INDIUM-PHOSPHIDE
    GREEN, RT
    WALKER, DK
    WOLFE, CM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (11) : 2278 - 2283
  • [7] Selective etching during the electrochemical C-V profiling of PM-HEMTs
    Kayambaki, M
    Tsagaraki, K
    Lagadas, M
    Panayotatos, P
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2001, 80 (1-3): : 164 - 167
  • [8] C-V PLOTTING, C-T MEASURING AND DOPANT PROFILING: APPLICATIONS AND EQUIPMENT.
    Burggraaf, Pieter S.
    Semiconductor International, 1980, 3 (09) : 29 - 42
  • [9] On C-V profiling near an isotypic heterojunction
    Zubkov, VI
    Melnik, MA
    Solomonov, AV
    SEMICONDUCTORS, 1998, 32 (01) : 52 - 53
  • [10] Electrochemical C-V profiling of p-type 6H-SiC
    Kayambaki, M
    Zekentes, K
    SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2, 2000, 338-3 : 1061 - 1064
12345