Elaboration, characterization and electrical properties of Na-Al-O thin films

被引：0
|
作者：
Caudron, E. [1 ]
Baud, G. [1 ]
Besse, J.P. [1 ]
Blondiaux, G. [1 ]
Jacquet, M. [1 ]
机构：
[1] Universite Blaise Pascal, Aubiere, France
来源：
Materials science & engineering. B, Solid-state materials for advanced technology | 1994年 / B26卷 / 2-3期
关键词：
Alumina - Composition - Crystal atomic structure - Ionic conduction in solids - Pressure effects - Sodium compounds - Sputter deposition - Textures - Thermodynamic stability - Thin films;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The ionic conductivity of Na-Al-O thin films (0.1-1.5 μm thick) deposited by r.f. and r.f.-magnetron sputtering was analyzed by the complex impedance method. The stability, the microtexture and the composition of the deposits are closely dependent on the operating conditions. The sputtering parameters were adjusted in order to optimize the deposition process. The combination of r.f. power and partial pressure of oxygen allows various sodium concentrations to be obtained in the Na-Al-O deposits. The ionic conductivity of these films follows an Arrhenius law with temperature and exhibits a maximum for the atomic ratio Na/Al = 0.08±0.01.
引用
收藏
页码：181 / 187
相关论文
共 50 条
  • [1] ELABORATION, CHARACTERIZATION AND ELECTRICAL-PROPERTIES OF NA-AL-O THIN-FILMS
    CAUDRON, E
    BAUD, G
    BESSE, JP
    BLONDIAUX, G
    JACQUET, M
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1994, 26 (2-3): : 181 - 187
  • [2] ELABORATION AND OPTIMIZATION OF AMORPHOUS NA-AL-O THIN-FILMS
    CAUDRON, E
    BAUD, G
    BESSE, JP
    JACQUET, M
    BLONDIAUX, G
    SOLID STATE IONICS, 1992, 57 (3-4) : 189 - 192
  • [3] Preparation of Na-Al-O films by laser chemical vapor deposition
    Chi, Chen
    Katsui, Hirokazu
    Goto, Takashi
    MATERIALS CHEMISTRY AND PHYSICS, 2015, 160 : 456 - 460
  • [4] THERMODYNAMIC CALCULATION OF THE NA-AL-O AND NA-AL-O-H SYSTEMS
    KUO, CK
    YAN, YM
    LI, ZC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : C295 - C295
  • [5] CRITICAL-REVIEW OF THE THERMODYNAMICS OF THE NA-AL-O SYSTEM
    BARSOUM, M
    JOURNAL OF MATERIALS SCIENCE, 1990, 25 (10) : 4393 - 4400
  • [6] ELABORATION AND CHARACTERIZATION OF THIN CALIXARENE FILMS
    BENCHAABANE, R
    GAMOUDI, M
    GUILLAUD, G
    JOUVE, C
    GAILLARD, F
    LAMARTINE, R
    SYNTHETIC METALS, 1994, 66 (01) : 49 - 54
  • [7] THERMODYNAMIC PROPERTIES OF THE IONIC CONDUCTING PHASES OF NA-AL-O SYSTEM BETWEEN 800 AND 1200 K
    ELREFAIE, FA
    SMELTZER, WW
    SOLID STATE IONICS, 1984, 12 (MAR) : 517 - 524
  • [8] Elaboration and characterization of Al doped ZnO nanorod thin films annealed in hydrogen
    Zhong, Wen-Wu
    Liu, Fa-Min
    Cai, Lu-Gang
    Peng-Ding
    Zhou, Chuan-Cang
    Zeng, Le-Gui
    Liu, Xue-Quan
    Li, Yi
    JOURNAL OF ALLOYS AND COMPOUNDS, 2011, 509 (09) : 3847 - 3851
  • [9] ELECTRICAL-PROPERTIES OF AL2O3 THIN-FILMS
    KOLARIK, RV
    COCHRAN, JK
    AMERICAN CERAMIC SOCIETY BULLETIN, 1981, 60 (03): : 402 - 402
  • [10] THERMODYNAMIC PROPERTIES OF THE IONIC CONDUCTING PHASES OF Na-Al-O SYSTEM BETWEEN 800 AND 1200 K.
    Elrefaie, F.A.
    Smeltzer, W.W.
    Solid State Ionics, 1600, 12 : 517 - 524
12345