Colorimetric properties of TiN thin films prepared by the Facing Targets Sputtering system

被引：0
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作者：
Nose, Masateru [1 ]
Nagae, Takekazu [1 ]
Yokota, Masaru [1 ]
Saji, Shigeoki [1 ]
Nakada, Mikiko [1 ]
机构：
[1] Takaoka Natl Coll, Takaoka, Japan
来源：
Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals | 1999年 / 63卷 / 07期
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摘要：
21
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页码：944 / 948
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