Simultaneous measurements of energetic O- ions and O atoms in sputtering of zinc oxide target

被引：0
|
作者：
Tominaga, Kikuo [1 ]
Sueyoshi, Yasuhiko [1 ]
Imai, Hiroshi [1 ]
Chong, Munfei [1 ]
Shintani, Yoshihiro [1 ]
机构：
[1] Univ of Tokushima, Tokushima, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 10期
关键词：
Energetic neutral oxygen atoms - Energetic oxygen ions - Flux intensity - Gas pressure - Planar magnetron sputtering - Time of flight method;
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摘要：
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页码：4745 / 4749
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