Energy spectra of sputtered species under sub-keV ion bombardment: Experiments and computer simulations

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Fb. Physik Inst. Oberflachen- S., Univ. Kaiserslautern, D-67663, Kaiserslautern, Germany [1 ]
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Nucl Instrum Methods Phys Res Sect B | / 1卷 / 36-48期
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