Accurate measurement of layer thickness using optical reflective spectra of Bragg mirrors grown by molecular beam epitaxy

被引：0
|
作者：
Toyoda, Takashi [1 ]
Mitsunaga, Kazumasa [1 ]
Ohta, Jun [1 ]
Kyuma, Kazuo [1 ]
机构：
[1] Mitsubishi Electric Corp, Hyogo, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 10期
关键词：
15;
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页码：4436 / 4439
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