Cylindrical DC magnetron sputtering assisted by microwave plasma

被引：0
|
作者：
Yonesu, Akira [1 ]
Kato, Takashi [1 ]
Takemoto, Hiroki [1 ]
Nishimura, Naoki [1 ]
Yamashiro, Yasumasa [1 ]
机构：
[1] Dept. of Elec. and Electron. Eng., Faculty of Engineering, Ryukyu University, 1, Senbaru, Nishihara-cho, Okinawa 903-0213, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 7 B期
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页码：4326 / 4328
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