Femtosecond laser-based technology for fast development of micromechanical devices

被引：1
|
作者：
Baehnisch, R. [1 ]
Gross, W. [1 ]
Staud, J. [1 ]
Menschig, A. [1 ]
机构：
[1] Deutsches Zentrum fuer Luft- und, Raumfahrt (DLR), Stuttgart, Germany
来源：
Sensors and Actuators, A: Physical | 1999年 / 74卷 / 01期
关键词：
Fabrication - Laser applications - Masks - Micromachining;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：31 / 34
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