CURRENT STATUS OF IONIZED-CLUSTER BEAM TECHNIQUE: A LOW ENERGY ION BEAM DEPOSITION.

被引：0

作者：

Yamada, I. ^{[1
]}

Takagi, T. ^{[1
]}

机构：

[1] Kyoto Univ, Kyoto, Jpn, Kyoto Univ, Kyoto, Jpn

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B21卷 / 2-4期

关键词：

RADIATION EFFECTS;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Ionized cluster beams (ICB) are widely used to deposit metals, semiconductors and insulating films. The paper describes the current status of this technique in source development and film deposition. Computer simulation proved the formation processes of large size clusters. ICB low energy ion bombarding effects and several examples of film deposition are described.

引用

页码：120 / 123

共 50 条

[1] CURRENT STATUS OF IONIZED-CLUSTER BEAM TECHNIQUE - A LOW-ENERGY ION-BEAM DEPOSITION
YAMADA, I
TAKAGI, T
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 120 - 123
[2] IONIZED-CLUSTER BEAM DEPOSITION
YAMADA, I
SEMICONDUCTORS AND SEMIMETALS, 1984, 21 : 83 - 107
[3] IONIZED-CLUSTER BEAM DEPOSITION
TAKAGI, T
YAMADA, I
SASAKI, A
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1128 - 1134
[4] NEW DEVELOPMENTS IN IONIZED-CLUSTER BEAM AND REACTIVE IONIZED-CLUSTER BEAM DEPOSITION TECHNIQUES
TAKAGI, T
MATSUBARA, K
TAKAOKA, H
YAMADA, I
THIN SOLID FILMS, 1979, 63 (01) : 41 - 51
[5] IONIZED-CLUSTER BEAM DEPOSITION AND EPITAXY
TAKAGI, T
YAMADA, I
MATSUBARA, K
THIN SOLID FILMS, 1979, 58 (01) : 9 - 19
[6] DEVELOPMENT OF THE IONIZED-CLUSTER BEAM TECHNIQUE
TAKAGI, T
JAPAN ANNUAL REVIEWS IN ELECTRONICS COMPUTERS & TELECOMMUNICATIONS, 1984, 13 : 323 - &
[7] METALLIZATION BY IONIZED CLUSTER BEAM DEPOSITION.
Yamada, Isao
Takagi, Toshinori
IEEE Transactions on Electron Devices, 1987, ED-34 (05) : 1018 - 1025
[8] FILM FORMATION TECHNIQUE BY IONIZED-CLUSTER BEAM
TAKAGI, T
YAMADA, I
TAKAOKA, H
SURFACE SCIENCE, 1981, 106 (1-3) : 544 - 550
[9] AL METALLIZATION BY IONIZED-CLUSTER BEAM DEPOSITION AND EPITAXY
YAMADA, I
INOKAWA, H
FUKUSHIMA, K
TAKAGI, T
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 900 - 905
[10] IONIZED-CLUSTER BEAM EPITAXY
TAKAGI, T
YAMADA, I
MATSUBARA, K
TAKAOKA, H
JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) : 318 - 325

← 1 2 3 4 5 →