Annealing effect on structure of polycrystalline silicon

被引：0
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作者：
Abdyukhanov, I.M. [1 ]
Prusakov, B.A. [1 ]
Gorelik, V.S. [1 ]
Plotnichenko, V.G. [1 ]
机构：
[1] Moskovskij Gosudarstvennyj, Tekhnicheskij Univ im. N.E. Baumana, Moscow, Russia
来源：
Metallovedenie i Termicheskaya Obrabotka Metallov | 1998年 / 10期
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页码：15 / 17
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