TRENDS IN CLEANROOM SELECTION: ALTERNATIVES FOR CONTAMINATION PROTECTION.

被引：0
|
作者：
Burnett, James [1 ]
机构：
[1] Inst for Microcontamination Control,, Santa Clara, CA, USA, Inst for Microcontamination Control, Santa Clara, CA, USA
来源：
Microcontamination | 1986年 / 4卷 / 05期
关键词：
BOX SYSTEM - CLEANROOM SELECTION - CONTAMINATION PROTECTION - WAFER-TRANSFER TUNNELS;
D O I：
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摘要：
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