Detection of reducing gases in air by β-Ga2O3 thin films using self-heated and externally (oven-) heated operation modes

被引:0
|
作者
TU-Budapest, Department of Atomic Physics, Budafoki ut 8, H-1111, Budapest, Hungary [1 ]
不详 [2 ]
不详 [3 ]
机构
来源
Sens Actuators, B Chem | / 1-3卷 / 378-382期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
5
引用
收藏
相关论文
共 50 条
  • [1] Detection of reducing gases in air by beta-Ga2O3 thin films using self-heated and externally (oven-) heated operation modes
    Reti, F
    Fleischer, M
    Perczel, IV
    Meixner, H
    Giber, J
    SENSORS AND ACTUATORS B-CHEMICAL, 1996, 34 (1-3) : 378 - 382
  • [2] A novel design and fabrication of self-heated In2O3 nanowire gas sensor on for ethanol detection
    Son, Dang Ngoc
    Hung, Chu Manh
    Le, Dang Thi Thanh
    Xuan, Chu Thi
    Van Duy, Nguyen
    Dich, Nguyen Quang
    Nguyen, Hugo
    Van Hieu, Nguyen
    Hoa, Nguyen Duc
    SENSORS AND ACTUATORS A-PHYSICAL, 2022, 345
  • [3] SENSING REDUCING GASES AT HIGH-TEMPERATURES USING LONG-TERM STABLE GA2O3 THIN-FILMS
    FLEISCHER, M
    MEIXNER, H
    SENSORS AND ACTUATORS B-CHEMICAL, 1992, 6 (1-3) : 257 - 261
  • [4] Effect of coadsorption of reducing gases on the conductivity of β-Ga2O3 thin film in the presence of O2
    Reti, E.
    Fleischer, M.
    Meixner, H.
    Giber, J.
    Sensors and Actuators, B: Chemical, 1994, B19 (1 -3 pt 2) : 573 - 577
  • [5] Ozone sensing using In2O3-modified Ga2O3 thin films
    Frank, J
    Zimmer, M
    Fleischer, M
    Meixner, H
    CHEMICAL SENSORS IV, PROCEEDINGS OF THE SYMPOSIUM, 1999, 99 (23): : 149 - 152
  • [6] Ozone Sensing Using In2O3-Modified Ga2O3 Thin Films
    Frank, J.
    Fleischer, M.
    Zimmer, M.
    Meixner, H.
    IEEE SENSORS JOURNAL, 2001, 1 (04) : 318 - 321
  • [7] Epitaxial growth of β-Ga2O3 thin films on Ga2O3 and Al2O3 substrates by using pulsed laser deposition
    An, Yuxin
    Dai, Liyan
    Wu, Ying
    Wu, Biao
    Zhao, Yanfei
    Liu, Tong
    Hao, Hui
    Li, Zhengcheng
    Niu, Gang
    Zhang, Jinping
    Quan, Zhiyong
    Ding, Sunan
    JOURNAL OF ADVANCED DIELECTRICS, 2019, 9 (04)
  • [8] Reactive Sputter Deposition of Ga2O3 Thin Films Using Liquid Ga Target
    Gajdics, Marcell
    Serenyi, Miklos
    Kolonits, Tamas
    Sulyok, Attila
    Horvath, Zsolt Endre
    Pecz, Bela
    COATINGS, 2023, 13 (09)
  • [9] SENSITIVE, SELECTIVE AND STABLE CH4 DETECTION USING SEMICONDUCTING GA2O3 THIN-FILMS
    FLEISCHER, M
    MEIXNER, H
    SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) : 81 - 84
  • [10] Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
    Donmez, Inci
    Ozgit-Akgun, Cagla
    Biyikli, Necmi
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2013, 31 (01):