EXPERIMENTAL INVESTIGATION OF THE FILM-TO-SUBSTRATE BOND STRENGTH OF SPUTTERED THIN FILM USING A SEMI-QUANTITATIVE TEST METHOD.

被引：0
|
作者：
Ting, Bond-Yen [1 ]
Ramalingam, S. [1 ]
Winer, W.O. [1 ]
机构：
[1] Georgia Inst of Technology, Sch of, Mechanical Engineering, Atlanta, GA,, USA, Georgia Inst of Technology, Sch of Mechanical Engineering, Atlanta, GA, USA
来源：
| 1600年 / 107期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
TRIBOLOGY
引用
收藏
相关论文
共 50 条
  • [1] AN EXPERIMENTAL INVESTIGATION OF THE FILM-TO-SUBSTRATE BOND STRENGTH OF SPUTTERED THIN-FILM USING A SEMIQUANTITATIVE TEST METHOD
    TING, BY
    RAMALINGAM, S
    WINER, WO
    JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1985, 107 (04): : 478 - 482
  • [2] A MODIFIED SEMI-QUANTITATIVE METHOD FOR DOPANT IN ZNS THIN-FILM WITH AN ION MICROANALYZER
    AOKI, A
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (10) : 1901 - 1904
  • [3] Development of a semi-quantitative tear film based method for public screening of diabetes mellitus
    Takkar, Brijesh
    Mukherjee, Sukhes
    Chauhan, Ramesh Chand
    Venkatesh, Pradeep
    MEDICAL HYPOTHESES, 2019, 125 : 106 - 108
  • [4] Investigation of Ni reaction with sputtered amorphous SiGe thin film on SiO2 substrate
    Qu, XP
    Duan, P
    Wu, YQ
    Chen, T
    Wang, GW
    Ru, GP
    Li, BZ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (01): : 20 - 24
  • [5] Investigation of Aging Effect on Asphalt Binders Using Thin Film and Rolling Thin Film Oven Test
    Kumar, V. Hemanth
    Subbarao, S. N.
    ADVANCES IN CIVIL ENGINEERING MATERIALS, 2019, 8 (01): : 637 - 654
  • [6] Investigation of creep stress characterization of thin film/substrate systems with indentation method
    Xu, B. X.
    Wang, X. M.
    Zhao, B.
    Yue, Z. F.
    MATERIALS AT HIGH TEMPERATURES, 2007, 24 (01) : 67 - 72
  • [7] Atomic force microscopy and nanoindentation investigation of polydimethylsiloxane elastomeric substrate compliancy for various sputtered thin film morphologies
    Maji, Debashis
    Das, Soumen
    JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART A, 2018, 106 (03) : 725 - 737
  • [8] Moisture sensor using reactive sputtered TiO2 thin film with negative substrate bias
    Chow, LLW
    Yuen, MMF
    Chan, PCH
    Teng, A
    PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON ELECTRONIC MATERIALS AND PACKAGING, 2000, : 449 - 456
  • [9] Thin film silicon substrate formation using electrochemical anodic etching method
    Kwon, J. -H.
    Lee, S. -H.
    Ju, B. -K.
    SURFACE ENGINEERING, 2009, 25 (08) : 603 - 605
  • [10] Warpage analysis of multilayer thin film/substrate systems using the Eigenstrain method
    Zhang, Zaoxu
    Zhao, Xueying
    Zhao, Kechen
    Ji, Qingxiang
    Wang, Changguo
    THIN-WALLED STRUCTURES, 2024, 205
12345