Phase equilibria and structural chemistry in the ternary systems M-Si-N and M-B-N (M = Al, Cu, Zn, Ag, Cd, In, Sn, Sb, Au, Tl, Pb, Bi)

被引：0
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作者：
Weitzer, F. [1 ]
Remschnig, K. [1 ]
Schuster, J.C. [1 ]
Rogl, P. [1 ]
机构：
[1] Inst fuer Physikalische Chemie der, Univ Wien, Wien, Austria
来源：
Journal of Materials Research | 1990年 / 5卷 / 10期
关键词：
Borides--Phase Equilibria - Boron Compounds--Phase Diagrams - Integrated Circuits; VLSI--Insulation;
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摘要：
Phase equilibria in the ternary systems M-Si-N and M-B-N (M = Cu, Ag, Au, Zn, Cd, Al, In, Tl, Sn, Pb, Sb, and Bi) at temperatures 50-100°C below the melting point of the metal components were investigated by means of x-ray powder analysis and are represented in the form of isothermal sections. No ternary compound formation was observed in any of the combinations M-Si-N and M-B-N. Silicon nitride and boron nitride, respectively, coexist with all metals investigated and with all binary compounds stable at the chosen temperatures. From unit cell dimensions negligible mutual solid solubilities are indicated between Si3N4 or BN and the metal components.
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页码：2152 / 2159
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