Experimental study of particle deposition on semiconductor wafers

被引：0
|
作者：
Pui, D.Y.H. [1 ]
Ye, Y. [1 ]
Liu, B.Y.H. [1 ]
机构：
[1] Mechanical Engineering Department, University of Minnesota, Minneapolis, MN 55455, United States
来源：
Aerosol Science and Technology | 1990年 / 12卷 / 04期
关键词：
Semiconducting Silicon;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：795 / 804
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