APPLICATION TO LSI PACKAGES OF SiC CERAMICS WITH HIGH THERMAL CONDUCTIVITY.

被引:0
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作者
Ogihara, Satoru [1 ]
Yasuda, Tomio [1 ]
Otsuka, Kanji [1 ]
Kobayashi, Fumiyuki [1 ]
机构
[1] Hitachi Ltd, Hitachi Research Lab,, Hitachi, Jpn, Hitachi Ltd, Hitachi Research Lab, Hitachi, Jpn
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3
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页码:16 / 20
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