Deposition and properties of refractory metallic films for diffusion barrier applications in Au-based metallizations to III-V semiconductors

被引：0

作者：

Kaminska, E. ^{[1
]}

Piotrowska, A. ^{[1
]}

Guziewicz, M. ^{[1
]}

Golaszewska, K. ^{[1
]}

Barcz, A. ^{[1
]}

Turos, A. ^{[1
]}

Mizera, E. ^{[1
]}

Adamczewska, J. ^{[1
]}

Rouvimov, S. ^{[1
]}

Liliental-Weber, Z. ^{[1
]}

Bremser, M.D. ^{[1
]}

Davis, R.F. ^{[1
]}

机构：

[1] Inst of Electron Technology, Warszawa, Poland

来源：

Electron Technology (Warsaw) | 1999年 / 32卷 / 04期

基金：

日本学术振兴会;

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：304 / 326

共 19 条

[1] Ohmic contacts with palladium diffusion barrier on III-V semiconductors
Galvan-Arellano, M.
Diaz-Reyes, J.
Pena-Sierra, R.
VACUUM, 2010, 84 (10) : 1195 - 1198
[2] PLASMA DEPOSITION OF AMORPHOUS HYDROGENATED CARBON-FILMS ON III-V SEMICONDUCTORS
POUCH, JJ
WARNER, JD
LIU, DC
ALTEROVITZ, SA
THIN SOLID FILMS, 1988, 157 (01) : 97 - 104
[3] CORRELATION FOR III-V SEMICONDUCTORS AND II-VI-SEMICONDUCTORS OF AU SCHOTTKY-BARRIER ENERGY WITH ANION ELECTRONEGATIVITY
MCCALDIN, JO
MCGILL, TC
MEAD, CA
PHYSICAL REVIEW LETTERS, 1976, 36 (01) : 56 - 58
[4] Preparation and properties of III-V based new diluted magnetic semiconductors
Ohno, H
ADVANCES IN COLLOID AND INTERFACE SCIENCE, 1997, 71-2 : 61 - 75
[5] Preparation and properties of III-V based new diluted magnetic semiconductors
Research and Development Corp of, Japan, Tsukuba, Japan
Adv Colloid Interface Sci, (61-75):
[6] Electronic structures of III-V based ferromagnetic semiconductors: half-metallic phase
Park, JH
Kwon, SK
Min, BI
PHYSICA B-CONDENSED MATTER, 2000, 281 : 703 - 704
[7] Materials design parameters for infrared device applications based on III-V semiconductors
Svensson, Stefan P.
Sarney, Wendy L.
Donetsky, Dmitry
Kipshidze, Gela
Lin, Youxi
Shterengas, Leon
Xu, Ye
Belenky, Gregory
APPLIED OPTICS, 2017, 56 (03) : B58 - B63
[8] PHOTO-ASSISTED DEPOSITION OF THIN-FILMS ON III-V SEMICONDUCTORS WITH UV AND IR LAMPS
NISSIM, YI
MOISON, JM
HOUZAY, F
LEBLAND, F
LICOPPE, C
BENSOUSSAN, M
APPLIED SURFACE SCIENCE, 1990, 46 (1-4) : 175 - 188
[9] Manganese-based magnetic compounds grown on III-V semiconductors: Growth technique, magnetic properties, and applications
Akinaga, H
Miyanishi, S
Asamitsu, A
Van Roy, W
Kuo, LH
Tomioka, Y
De Boeck, J
Borghs, G
ASDAM'98, SECOND INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS, CONFERENCE PROCEEDINGS, 1998, : 145 - 154
[10] Optical properties of multilayer (III-V semiconductors) thin films within the framework of DFT plus characteristic matrix
Dadsetani, M.
Omidi, A. R.
OPTIK, 2015, 126 (21): : 2999 - 3003

← 1 2 →