Room temperature deposition of titanium carbide by ion-beam-enhanced reaction of titanium films with hydrocarbons

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作者：
Schroeer, A. [1 ]
Ensinger, W. [1 ]
机构：
[1] MAT GmbH Dresden, Heidelberg, Germany
来源：
Surface and Coatings Technology | 1996年 / 84卷 / 1 -3 pt 2期
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页码：448 / 452
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