Low pressure magnetron sputtering and selfsputtering discharges

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Acad of Sciences of the Czech, Republic, Prague, Czech Republic [1 ]
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Vacuum | / 3卷 / 307-311期
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This work was partially sponsoredb y a grant of the Grant Agency of the Czech Republicn o. 2021931050T8h.e co-operation with A Ra[!text type='js']js[!/text]ky on developmenot f the new magnetronsis greatly appreciated;
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