Fabrication Method of Densely Spaced 1.55 μm Multiple-Wavelength Vertical-Cavity Surface-Emitting Laser Array Structure for the Application of Dense Wavelength Division Multiplexing

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机构：
[1] Kim, Jong-Hee
[2] Yoo, Byueng-Su
[3] Shin, Jae-Heon
[4] Han, Won-Suk
[5] Kwon, O-Kyun
[6] Ju, Youtig-Gu
[7] Song, Hyun-Woo
来源：
Kim, J.-H. (jhkim913@etri.re.kr) | 1600年 / Japan Society of Applied Physics卷 / 43期
关键词：
Etching - Hydrogen peroxide - Ionization - Metallorganic chemical vapor deposition - Mirrors - Semiconducting indium phosphide - Superlattices - Wavelength division multiplexing;
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摘要：
We demonstrate a very precise cavity-mode control scheme in a 1.55 μm multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) array. For the precise control of the cavity mode, selective wet etchings of InP and InAlGaAs superlattice tuning layers are investigated using HC1/H2O and H3PO3/H2O2/H2O solution systems, respectively. The average calibrated cavity-mode spacing between channels for the fabricated eight-channel full VCSEL array structure is approximately 0.9 nm, which agrees well with the calculated value of 0.8 nm.
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