DEPOSITION OF HARD WEAR-RESISTANT COATINGS BY REACTIVE dc PLASMATRON SPUTTERING.

被引：0
|
作者：
Schiller, S. [1 ]
Heisig, U. [1 ]
Beister, G. [1 ]
Steinfelder, K. [1 ]
Struempfel, J. [1 ]
Korndoerfer, Chr. [1 ]
Sieber, W. [1 ]
机构：
[1] Forschungsinstitut Manfred von, Ardenne, Dresden, East Ger, Forschungsinstitut Manfred von Ardenne, Dresden, East Ger
来源：
| 1600年 / 118期
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摘要：
PROTECTIVE COATINGS
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