Temperature micro-sensor based on the thermo-optic effect in silicon

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作者：
机构：
[1] Cocorullo, Giuseppe
[2] Della Corte, Francesco G.
[3] Iodice, Mario
[4] Rendina, Ivo
[5] Sarro, Pasqualina M.
来源：
Cocorullo, Giuseppe | 1600年 / AEI, Milan, Italy卷 / 07期
关键词：
Fabry-Perot cavity - Temperature micro-sensor - Thermo-optic effect;
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摘要：
A new interferometric temperature sensor in silicon technology, suitable for full integration with other standard opto- and micro-electronic devices, has been realised. The sensor consists of a planar Fabry-Perot cavity defined on a chip by highly anisotropic Reactive Ion Etching. Temperature variations are detected by monitoring the transmitted intensity of a probing monochromatic (λ = 1.5 μm) light beam launched into the cavity. A 1700 μm long cavity is demonstrated to allow a temperature resolution of about 1 K. Predictions on the limit resolution attainable with this technology are also given.
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