LIQUID PHASE EPITAXIAL GROWTH OF HIGH RESISTIVITY GaAs LAYERS BY IMPURITY DOPING.

被引:0
|
作者
Kojima, Kiyoaki
Hasegawa, Hideki
机构
来源
Electronics & communications in Japan | 1980年 / 63卷 / 11期
关键词
CRYSTALS - Epitaxial Growth;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:109 / 117
相关论文
共 50 条
  • [1] VAPOUR-PHASE EPITAXIAL GROWTH OF SUBMICRON GaAs LAYERS AND HIGH RESISTIVITY BUFFER LAYERS.
    Wang Yungchen
    Zhu Yimin
    Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 1981, 2 (03): : 182 - 188
  • [2] DECREASE OF DISLOCATIONS IN GAAS BY ISOELECTRONIC DOPING OF LIQUID-PHASE EPITAXIAL LAYERS
    LIU, WJ
    CHEN, NF
    JOURNAL OF CRYSTAL GROWTH, 1995, 154 (1-2) : 19 - 22
  • [3] GaAs photoconductors for submillimeter astronomy - Liquid phase epitaxial growth of GaAs layers
    Abe, O
    Murakami, H
    Okamura, Y
    Wakaki, M
    Yakawa, T
    Koyama, M
    Ogawa, T
    INFRARED TECHNOLOGY AND APPLICATIONS XXV, 1999, 3698 : 603 - 611
  • [4] IMPURITY PHOTOCONDUCTIVITY IN GAAS EPITAXIAL LAYERS
    LISENKER, BS
    LISINKER, SS
    MARONCHUK, YE
    SHERSTYAKOVA, VN
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1974, (11): : 19 - 23
  • [5] HIGH-RESISTIVITY LPE LAYERS OF GAAS BY IRON DOPING
    KOJIMA, K
    HASEGAWA, H
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 62 (02): : 673 - 679
  • [6] DOPING OF GAAS EPITAXIAL LAYERS WITH OXYGEN
    MAKSIMOV, VL
    DVORETSKII, SA
    VASILEVA, LV
    SIDOROV, YG
    INORGANIC MATERIALS, 1980, 16 (06) : 657 - 660
  • [7] LIQUID PHASE EPITAXIAL GROWTH OF GaAs.
    Iida, Hideyo
    Uchida, Nobuo
    Komiya Yoshio
    Tarui, Yasuo
    Bulletin of the Electrotechnical Laboratory, Tokyo, 1976, 40 (4-5): : 458 - 464
  • [8] GROWTH OF THICK LIQUID-PHASE EPITAXIAL GAAS-SI LAYERS AND THEIR CHARACTERIZATION
    KACHARE, AH
    SPITZER, WG
    WHELAN, JM
    NARAYANAN, GH
    JOURNAL OF APPLIED PHYSICS, 1976, 47 (11) : 5022 - 5029
  • [9] IMPURITY PROFILE DETERMINATION IN EPITAXIAL GAAS CRYSTALS ON HIGH-RESISTIVITY SUBSTRATES
    YAMASHITA, A
    YAMAGUCHI, M
    AOKI, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1973, 12 (08) : 1267 - 1268
  • [10] LIQUID-PHASE EPITAXIAL-GROWTH OF THIN GAAS LAYERS FROM SUPERCOOLED SOLUTIONS
    MIHARA, M
    TOYODA, N
    HARA, T
    APPLIED PHYSICS LETTERS, 1975, 27 (03) : 131 - 133