New ion counting system devised for mass-selective detection of sputtered neutrals in laser SNMS

被引：0
|
作者：
机构：
[1] Ichimura, Shingo
[2] Goto, Keisuke
[3] Kokubun, Kiyohide
[4] Shimizu, Hazime
[5] Matsuura, Shigeki
来源：
Ichimura, Shingo | 1600年 / 29期
关键词：
Laser Pulses - Mass Spectrometry - Sputtering;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20-30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.
引用
收藏
相关论文
共 19 条
12