Liquid source chemical vapor deposition of high-dielectric-constant (Ba, Sr)TiO3 films

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作者：
Kawahara, Takaaki [1 ]
Yamamuka, Mikio [1 ]
Yuuki, Akimasa [1 ]
Ono, Kouichi [1 ]
机构：
[1] Mitsubishi Electric Corp, Japan
来源：
Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi) | 1998年 / 125卷 / 01期
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页码：47 / 54
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