RECENT TRENDS IN SPUTTERING EQUIPMENT.

被引：0
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作者：
Aronson, Arnold
Hill, Michael
机构：
来源：
Water Resources and Environmental Engineering Research Report (State University of New York at Buffalo, Department of Civil Engineering) | 1979年
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
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摘要：
Vacuum technology
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