Analysis of trace impurities in nitrogen gas by high pressure ionization mass spectrometry

被引：0
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作者：
Ishihara, Yoshio [1 ]
Umehara, Hitomi [1 ]
Nishina, Akira [1 ]
Kimijima, Tetsuya [1 ]
机构：
[1] Nippon Sanso Corp, Ibaraki, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 11期
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页码：6999 / 7003
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