STATISTICAL MANAGEMENT AND ANALYSIS OF PARTICLE COUNT DATA IN ULTRACLEAN ENVIRONMENTS: PART I.

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作者：
Bzik, Thomas J.
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来源：
Microcontamination | 1986年 / 4卷 / 05期
关键词：
INTEGRATED CIRCUIT MANUFACTURE - Contamination - STATISTICAL METHODS - Applications;
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摘要：
The author explores the application of statistical methods to the analysis of particulate contamination data by reviewing a variety of issues related to cleanroom data management including methods for judging whether a given standard has been achieved, for estimating data requirements, and for determining how data collection and recording rules affect subsequent analyses. Statistical quantification of extremely low levels of microcontamination is emphasized.
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页码：58 / 63
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