Modelling the dielectric function of thin films measured by spectroscopic ellipsometry: determination of microstructure and density

被引：0
|
作者：
Haage, T. [1 ]
Schmidt, U.I. [1 ]
Schroder, B. [1 ]
Oechsner, H. [1 ]
机构：
[1] Univ. Kaiserslautern, Fachbereich, Physik und Forschungsschwerpunkt, Materialwiss., Kaiserslautern, Germany
来源：
Fresenius' journal of analytical chemistry | 1995年 / 353卷 / 5-8期
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页码：556 / 558
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