Protective CVD coatings - going from high temperature processes to plasma activation

被引:0
|
作者
Bonetti, R.S. [1 ]
机构
[1] Berna/Bernex AG, Olten, Switzerland
关键词
Chemical reactions - Chemical vapor deposition - Die casting inserts - High temperature operations - History - Substrates;
D O I
10.4028/www.scientific.net/msf.163-165.479
中图分类号
学科分类号
摘要
The basic principles of the thermally activated CVD processes, from high-temperature to plasma activation processes, are presented, as well as the interactions between coating and substrate material. Possibilities of structural control by the process parameters are discussed. Some typical examples in the field of coated cemented carbide cutting inserts and sintered cold work tool steels illustrate this possibility. Case studies of amorphous diamond-like films obtained by PA-CVD, in particular, demonstrate the potential and limits of thin protective coatings in industrial applications.
引用
收藏
页码:479 / 496
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