SrTiO3 thin film preparation by Ion beam sputtering and its dielectric properties

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作者：
Yamamichi, Shintaro [1 ]
Sakuma, Toshiyuki [1 ]
Takemura, Koichi [1 ]
Miyasaka, Yoichi [1 ]
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[1] NEC Corp, Kawasuki, Japan
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| 1600年 / 30期
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