Systeme Circuit Simulation with FInIte Element Models for MIcroelectromechanical Systems

被引：0
|
作者：
Pelz, Georg [1 ]
Lüdecke, Andre [1 ]
Leineweber, Michael [2 ]
Zimmer, Günter [3 ]
机构：
[1] Gerhard-Mercator-Universität-GH Duisburg, Germany
[2] Gerhard-Mercator-Universität-GH Duisburg Günter Zimmer, Gerhard-Mercator-Universität-GH Duisburg, Germany
[3] Gerhard-Mercator-Universität-GH Duisburg / Fraunhofer-Institut Ims Duisburg, Germany
来源：
IT - Information Technology | 1999年 / 41卷 / 04期
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页码：33 / 38
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