MI1201-BASED MASS SPECTROMETER WITH A FAST-ATOM SPUTTERING.

被引：0

作者：

Tantsyrev, G.D. ^{[1
]}

Denisov, G.M. ^{[1
]}

Shalomeev, A.S. ^{[1
]}

机构：

[1] Acad of Sciences of the USSR, Moscow, USSR, Acad of Sciences of the USSR, Moscow, USSR

来源：

Instruments and experimental techniques New York | 1986年 / 29卷 / 2 pt 2期

关键词：

ATOMIC BEAMS - SPUTTERING;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Attachments to the MI1201 mass spectrometer are described that permit operation with sputtering by ionization of solid and liquid specimens by a beam of accelerated atoms. The mass spectrometer also permits recording of neutral sputtered particles. The resolution of the mass spectrometer is 1000, the mass range is 2-900, and the sensitivity is approx. 10** minus **7 g. Mass spectra of positive and negative ions can be recorded. The specimen temperatures can be varied from minus 70 to plus 400 degree C.

引用

页码：441 / 445

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