Modeling of silicon carbide crystal growth by physical vapor transport method

被引:4
|
作者
Ma, R.-H. [1 ]
Chen, Q.-S. [1 ]
Zhang, H. [1 ]
Prasad, V. [1 ]
Balkas, C.M. [2 ]
Yushin, N.K. [2 ]
机构
[1] Consortium for Crystal Growth Res., Stt. Univ. New York at Stony Brook, Stony Brook, NY 11794-2300, United States
[2] Sterling Semiconductor Inc., Sterling, VA 20166, United States
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学科分类号
摘要
Crystal growth
引用
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页码:352 / 359
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