Interfacial reactions of ultrahigh-vacuum-deposited Cu thin films on atomically cleaned (111)Si. II. Oxidation of silicon catalyzed by η double prime -Cu3Si at room temperature

被引：0

|

作者：

Liu, C.S.

Chen, L.J.

机构：

来源：

Journal of Applied Physics | 1993年 / 74卷 / 09期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

收藏

相关论文

共 17 条

[1] INTERFACIAL REACTIONS OF ULTRAHIGH-VACUUM-DEPOSITED CU THIN-FILMS ON ATOMICALLY CLEANED SI-111 .2. OXIDATION OF SILICON CATALYZED BY ETA''-CU3SI AT ROOM-TEMPERATURE
LIU, CS
CHEN, LJ
JOURNAL OF APPLIED PHYSICS, 1993, 74 (09) : 5507 - 5509
[2] Interfacial reactions of ultrahigh-vacuum-deposited Cu thin films on atomically cleaned (111)Si. I. Phase formation and interface structure
1600, (74):
[3] INTERFACIAL REACTIONS OF ULTRAHIGH-VACUUM-DEPOSITED CU THIN-FILMS ON ATOMICALLY CLEANED (111)SI .1. PHASE-FORMATION AND INTERFACE STRUCTURE
LIU, CS
CHEN, LJ
JOURNAL OF APPLIED PHYSICS, 1993, 74 (09) : 5501 - 5506
[4] Interfacial reactions of ultrahigh-vacuum-deposited Cu thin films on Si, Ge and on epitaxial Si-Ge layers on Si and Ge
Chen, LJ
Liu, CS
Lai, JB
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2004, 7 (03) : 143 - 156
[5] ROOM-TEMPERATURE OXIDATION OF SILICON CATALYZED BY CU3SI
HARPER, JME
CHARAI, A
STOLT, L
DHEURLE, FM
FRYER, PM
APPLIED PHYSICS LETTERS, 1990, 56 (25) : 2519 - 2521
[6] Simultaneous occurrence of multiphases in the interfacial reactions of ultrahigh-vacuum-deposited V and Zr thin films on (111)Si
Lin, JH
Hsieh, WY
Chen, LJ
JOURNAL OF APPLIED PHYSICS, 1996, 79 (12) : 9123 - 9128
[7] EPITAXIAL-GROWTH OF CU THIN-FILMS ON ATOMICALLY CLEANED (111)SI AT ROOM-TEMPERATURE
LIU, CS
CHEN, SR
CHEN, WJ
CHEN, LJ
MATERIALS CHEMISTRY AND PHYSICS, 1993, 36 (1-2) : 170 - 173
[8] Room-temperature oxidation of silicon in the presence of Cu3Si
Natl Tsing Hua Univ, Hsinchu, Taiwan
Thin Solid Films, 1-2 (187-198):
[9] ROOM-TEMPERATURE OXIDATION OF SILICON IN THE PRESENCE OF CU3SI
LIU, CS
CHEN, LJ
THIN SOLID FILMS, 1995, 262 (1-2) : 187 - 198
[10] Dependence of room-temperature oxidation of silicon catalyzed by Cu3Si on the silicide grain size
Liu, G.S.
Chen, L.J.
Journal of Applied Physics, 1994, 75 (05):