共 50 条
- [1] Theory and experiment on hydrodynamic suspension ultra-smooth machining for silicon wafers Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2007, 15 (07): : 1084 - 1089
- [2] Fluid pressure and its effect on hydrodynamic suspension ultra-smooth machining Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2008, 16 (06): : 1069 - 1074
- [3] Compliant Control at Micro-displacement in Hydrodynamic Suspension Ultra-smooth Machining SURFACE FINISHING TECHNOLOGY AND SURFACE ENGINEERING, 2008, 53-54 : 33 - +
- [4] Research Progress of Ductile Removal Mechanism for Hard-brittle Single Crystal Materials Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2019, 55 (03): : 181 - 190
- [5] Research on Laser Cleaning of Ultra Precision Machining Hard-Brittle Workpieces FRONTIERS OF MANUFACTURING AND DESIGN SCIENCE, PTS 1-4, 2011, 44-47 : 3314 - 3317
- [6] Research Progress of Material Removal Mechanism in Plane Lapping and Polishing of Hard-Brittle Materials Cailiao Daobao/Materials Reports, 2022, 36 (07):
- [7] Removal mechanism in wire-sawing of hard-brittle material ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY, 2004, 471-472 : 192 - 195
- [8] Ductile mode machining of hard-brittle materials under high hydrostatic pressure (2nd report) - Machining test of hard-brittle materials under high hydrostatic pressure Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 2002, 68 (10): : 1351 - 1355
- [9] Ultra-smooth Cu surface fabricated by hydrodynamic suspension polishing technique PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2019, 57 : 189 - 194