Absolute distance measurement by using 117 μm synthetic wavelength

被引：0

作者：

Liang J. ^{[1
]}

Long X. ^{[1
]}

Zhang B. ^{[1
]}

Jin S. ^{[1
]}

机构：

[1] Department of Optoelectronic Engineering, College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha

来源：

Guangxue Xuebao/Acta Optica Sinica | 2010年 / 30卷 / 10期

关键词：

Absolute distance interferometer; Laser interferometer; Measurements; Multi-wavelength; Phase measurement;

D O I：

10.3788/AOS20103010.2947

中图分类号：

学科分类号：

摘要：

To overcome the defects of large error in two-longitudinal-mode wavelengths interferometer for absolute distance measurement, a new kind of multi-wavelength absolute distance interferometer is introduced. A double-mode 633 nm He-Ne laser and a 629 nm He-Ne laser are employed to generate 117 μm synthetic wavelength, with which distance with high precision is measured by using the double heterodyne interferometric technique. The static and dynamic experiments show that due to the shorter synthetic wavelength, the uncertainty can reaches 3.8 × 10-6 L+57 nm and the error is 2 μm within 500 mm. From the uncertainty of synthetic wavelength, the error of the new interferometer is also discussed. The interferometer could measure distance with high precision if coupled with two-longitudinal-mode beat measurement system.

引用

页码：2947 / 2951

页数：4

共 14 条

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