Scanning nonlinear dielectric microscope with super high resolution

被引：0
|
作者：
Cho, Yasuo [1 ]
机构：
[1] Research Institute of Electrical Communication, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2007年 / 46卷 / 7 B期
关键词：
Scanning nonlinear dielectric microscopy (SNDM) with super-high resolution is described. First; experimental results on the ferroelectric domain and visualization of charge stored in flash memories are shown following a description of the theory and principle of SNDM. Next; a higher-order nonlinear dielectric imaging method (HO-SNDM) and non contact SNDM (NC-SNDM) are proposed. Using NC-SNDM; the first achievement of atomic resolution in capacitance measurement is successfully demonstrated. In addition to these techniques; a new three-dimensional (3D)-type of SNDM for measuring the 3D distribution of ferroelectric polarization has been developed. Finally; a very high density ferroelectric data storage system based on SNDM with an actual information density of 1 Tbits/in.2 is demonstrated. © 2007 The Japan Society of Applied Physics;
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摘要：
Journal article (JA)
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页码：4428 / 4434
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