The Ti60 alloy was surface modified with coatings of Ni-Co-Cr-Al-Y-Si layers, deposited by multi-arc ion plating. The impacts of the deposition conditions, such as the pressure, substrate temperature, bias voltage, and current of the multi-arc, on the film quality were studied. The microstructures and oxidation resistance of the surface modified Ti60 were characterized with X-ray diffraction, scanning electron microscopy and other classical techniques. The results show that the surface modification with the Ni-Co-Cr-Al-Y-Si layers significantly increases the oxidation resistance of Ti60 alloy, with fairly high oxidation resistance at 600°C, 650°C, and 700°C. The calculation of the cyclic oxidation dynamics shows that the curve basically conforms to the parabola rule.