Electrochemical stabilization of porous silicon multilayers for sensing various chemical compounds

被引：0
|
作者：
Salem, M.S. [1 ]
Sailor, M.J. [2 ]
Harraz, F.A. [1 ,3 ]
Sakka, T. [1 ]
Ogata, Y.H. [1 ]
机构：
[1] Institute of Advanced Energy, Kyoto University, Uji, Kyoto 611-0011, Japan
[2] Department of Chemistry and Biochemistry, University of California, San Diego, CA 92039-0358
[3] Advanced Materials Technology Department, Central Metallurgical Research and Development Institute, Helwan, Cairo 11421, Egypt
来源：
Journal of Applied Physics | 2006年 / 100卷 / 08期
关键词：
Porous silicon rugate filters are fabricated and investigated for their ability to sense chemical species. The durability of the filter is tested by allowing the structure to undergo many cycles of adsorption and desorption of vapor-phase ethanol molecules. The characteristic reflectivity peak of the structure exhibits a relative blueshift of 2.7% after 86 adsorptiondesorption cycles. The observed shift is ascribed to the formation of silicon dioxide; which has a lower refractive index than that of silicon. In order to stabilize the structure against oxidation expected from cycling and environmental exposure; the filter is subjected to electrochemical oxidation in an aqueous sulfuric acid electrolyte. The treatment dramatically improves stability of the sensor; a relative blueshift of <0.4% is observed after 100 adsorptiondesorption cycles for this sensor. The sensitivity of the sensor is also affected by electrochemical oxidation: the response to saturated ethanol in air changes from Δλ=100 nm to Δλ=70 nm; respectively. Theoretical calculations using the Bruggeman effective medium approximation and the characteristic matrix method indicate that up to 15% (by volume) of silicon is transformed to silicon dioxide by the electrochemical oxidation procedure. This volume ratio is close to that estimated from Auger electron spectroscopy measurements. © 2006 American Institute of Physics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [1] Electrochemical stabilization of porous silicon multilayers for sensing various chemical compounds
    Salem, M. S.
    Sailor, M. J.
    Harraz, F. A.
    Sakka, T.
    Ogata, Y. H.
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (08)
  • [2] Optical sensing of chemical compounds using porous silicon microcavities
    De Stefano, L
    Moretti, L
    Rendina, I
    2002 IEEE/LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2, 2002, : 99 - 100
  • [3] Application of porous silicon in chemical sensing
    Gupta, A
    Jain, VK
    Jain, A
    Singhal, GK
    SEMICONDUCTOR DEVICES, 1996, 2733 : 591 - 593
  • [4] Assisted electrochemical etching of photonic luminescent multilayers of porous silicon
    Nava, R.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2010, 43 (45)
  • [5] Electrochemical sensing of DNA with porous silicon layers
    Lugo, J. E.
    Ocampo, M.
    Kirk, A. G.
    Plant, D. V.
    Fauchet, P. M.
    JOURNAL OF NEW MATERIALS FOR ELECTROCHEMICAL SYSTEMS, 2007, 10 (02) : 113 - 116
  • [6] Electrochemical Fabrication and Characterization of Porous Silicon/Polypyrrole Composites and Chemical Sensing of Organic Vapors
    Dian, Juraj
    Konecny, Martin
    Broncova, Gabriela
    Krondak, Martin
    Matolinova, Iva
    INTERNATIONAL JOURNAL OF ELECTROCHEMICAL SCIENCE, 2013, 8 (02): : 1559 - 1572
  • [7] Porous silicon multilayers for sensing by tuneable IR-transmission filtering
    Volk, J
    Balázs, J
    Tóth, AL
    Bársony, I
    SENSORS AND ACTUATORS B-CHEMICAL, 2004, 100 (1-2): : 163 - 167
  • [8] Chemical stabilization of porous silicon for enhanced biofunctionalization with immunoglobulin
    Naveas, Nelson
    Torres Costa, Vicente
    Gallach, Dario
    Hernandez-Montelongo, Jacobo
    Martin Palma, Raul Jose
    Predenstinacion Garcia-Ruiz, Josefa
    Manso-Silvan, Miguel
    SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 2012, 13 (04)
  • [9] Transmittance correlation of porous silicon multilayers used as a chemical sensor platform
    Osorio, E.
    Urteaga, R.
    Juarez, H.
    Koropecki, R. R.
    SENSORS AND ACTUATORS B-CHEMICAL, 2015, 213 : 164 - 170
  • [10] Chemical surface modification of porous silicon with various silanes
    Linsmeier, J
    Probstle, H
    Hilpert, U
    Fricke, J
    Arens-Fischer, R
    LUMINESCENT MATERIALS VI, 1998, 97 (29): : 100 - 111
12345