Make of the sub-micron gratings and the inspection of filter character of the zero-order diffraction efficiency

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Optical and Electronic Information College, University of Shanghai Science and Technology, Shanghai 200093, China [1 ]
不详 [2 ]
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Guangxue Jishu | 2008年 / 6卷 / 847-850期
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摘要：
The primary technique and characteristic of sub-micron gratings are analyzed, and the sub-micron gratings used for the security that has filter character of the zero-diffraction efficiency are made. The measure result of the filter character of the zero-diffraction efficiency is same as the calculate result with the rigorous coupled-wave theory. The parameters of the sub-micron gratings used for the security are designed.
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